Plasma Sensors offers full system for the probe measurements.
Our Multifunctional Plasma Probe Analyzer (MFPA) includes the controller device
communicating with Windows based machine and the software package which support
the probe EEDF measurements in steady and time-varying plasmas.
Our Plasma Probes are expertly designed to suppress RF interferences
and minimize plasma disturbances. Our Probe Linear Drive allows spatial measurements
in plasma chambers.
Multifunctional Plasma Probe Analyzer (MFPA)
MFPA is the next generation of our probe instruments, adding multi- functionality,
enhanced capabilities and unique state-of-the-art features unavailable in any other
Reliable high-quality EEDF and plasma parameter measurements in research
and industrial CW and pulsed plasmas in noble and reactive gases,
having high DC and RF potentials and multi-frequency drive (2-200 MHz);
Automated real time processing and output of the EEDF and the plasma parameters
of the steady or time-varying plasmas;
High energy resolution and wide dynamic range which enables precise analyses
of low and high energy parts of EEDF, correspondingly representing the majority of
electron population and the electron impacted inelastic processes;
The EEDF measurements which are immune to the probe work-function variation,
plasma potential drift and noise common to many other probe systems;
Combination of the probe cleaning modes: continuous probe ion bombardment,
heating by the electron current and periodical applying of high voltage pulses;
Synchronous control of peripheral devices i.e. motor drives, electrostatic
energy analyzers, probe array multiplexors.
MFPA can be configured to output real-time data for the end of process detection and the deposition rate assessment.
Read more: MFPA specifications
Plasma Sensors provides two types of air jet cooled probes. Our plasma probes design
minimizes EEDF distortion through efficient RF signal rejection and wide band noise suppression. The end section and the tip holder of our probes are miniaturized to eliminating the plasma disturbance.
Standard probe for EEDF measurements has built-in filter with RF rejection in the range
between 2 and 200 MHz. The probe comes with easy replaceable probe tips using Tungsten
or Iridium wire with diameters 0.5 to 0.05 mm. The probes could be ordered in sizes which
fit particular customer requirements. The probe filters can also be built to meet custom
The Probe Linear Drive permits automated spatially resolved measurements with our
plasma probes. Our standard Drive has 30 cm full travel range and NW-40 flange
connector to the plasma chamber. The Linear Drive travel length and the connection
flange can be customized to the customer specifications.
The Linear Drive controller software provides seamless interface
for synchronization with the probe measurement routines.